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New Products & Services

October 1, 2013

A new member to this family of turbo-molecular pumps

The new TMP-X2905/X3405 Series of turbo-molecular pumps (TMP) has integrated power supplies and 3,000 L/s class pumping speeds for the semiconductor and flat-panel-display manufacturers. Integrating the power supply into the pump reduces the height of the new pump by 15% while maintaining the pumping performance. The TMP-X pumps do not require racks and cables, thus this Series offers a greater degree of freedom in the design of low-cost, small-footprint manufacturing equipment. Incorporation of a pump temperature-control function and improvement of the motor power outlets has enabled the use of the TMP-X Series for processes involving high gas flowrates and reactive gases.— Shimadzu Corp., Kyoto, Japan

www.shimadzu.com

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