Bronkhorst High-Tech
The Vapor Delivery Modules (VDM) are compact sub-systems incorporating a liquid flow controller (thermal or Coriolis), one or two mass-flow controllers for carrier gas and a temperature-controlled mixing and evaporation device. The modules are equipped with a 1.8-in. thin-film transistor (TFT) display and push-buttons for local readout and control. The systems can also be operated via digital communication (RS232 or FLOW-BUS). Optionally, the units can be supplied with an additional mass-flow controller for dilution and with local or remote trace-heating temperature control. VDM-Series vaporizers are suitable for vapor deposition and coating processes for the production of semiconductor chips, displays and solar cells. — Bronkhorst High-Tech B.V., Ruurlo, the Netherlands