Showa Denko increases capacity for semiconductor-processing high-purity gases
Mary Page Bailey
Showa Denko K.K. (SDK; Tokyo, Japan; www.sdk.co.jp) has strengthened its system for supplying semiconductor-processing high-purity gases in Asia. In China, SDK increased the production capacity for high-purity ammonia at its subsidiary in Zhejiang Province in January this year. This month, the subsidiary started shipments by ISO tank container on a full scale, in addition to conventional shipments by cylinder, to meet brisk demand from customers. In Taiwan and Singapore, SDK completed expansions of high-purity-gas stockpiling warehouses at distribution bases by the end of last year. Furthermore, SDK will improve waste-gas-disposal activities, in addition to the production and supply of high-purity gases.
High-purity gases are used in the manufacturing processes of semiconductors, liquid crystal display (LCD) panels, and light-emitting diodes (LEDs) for deposition of oxide and nitride films, etching, and cleaning. Demand for high-purity gases is growing especially in East Asia, where electronics production sites are integrated.
SDK is the sole manufacturer in the world that supplies wide-ranging high-purity gases based on ammonia, chlorine, and fluorine. In the process of supplying these products, SDK controls containers and also offers the impurity ultramicroanalytical technology.