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A modular power supply for polysilicon production plants

| By Chemical Engineering

The Design of the Poly Power Unit (PPU; photo) features extremely good cooling properties, has low space requirements and can be integrated precisely in polysilicon production plants thanks to flexible software parameter assignment. The PPU allows exact rating of the power supply for any of this company’s chemical vapor deposition (CVD) reactors, and is integrated in the Simatoc 7 control system, which allows the use of energy-management functions, advanced process-control algorithms, and a thermostatically controlled control loop for the energy carrier. The current infeed in the reactor can be exactly matched to the gas supply. — Siemens Industry Automation Div., Nuremberg, Germany

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