This company has launched new high-temperature perfluoroelastomer (FFKM) and fluoroelastomer (FKM) materials that are fluorosurfactactant free, meaning they are made without low-molecular-weight PFAS fluorosurfactants.
Source: Trelleborg
Isolast® PureFab® JPF50 is a high-purity FFKM formulated to meet stringent purity and plasma resistance requirements across diverse chemistries and the most common thin-film precursors. It is manufactured without fillers or fluorosurfactants, extends service life and increases yields. JPF50 helps reduce risks of contamination and maximizes process yields through its extremely low outgassing and minimal particle emission, performing exceptionally at high temperatures of up to 300°C/+572°F, ensuring reliable sealing in the harshest environments. It is designed with low compression set and robust mechanical strength to support longer intervals between maintenance and help minimize unplanned downtime. JPF50 excels for seals and components within deposition processes (PECVD, HDPCVD, PEALD) and etching processes (ALE, dry etching), and is ideal for chamber lid and gas inlet seals as well as bonded slit valve door seals.
Isolast® PureFab® JPF58 is an FFKM developed for sustained, reliable operation in the most extreme temperature environments where long-term thermal stability and purity are essential. JPF58 delivers exceptional thermal stability up to +300 °C/+572 °F for consistent seal integrity over extended use, and resists cracking when exposed to high mechanical and thermal stress, contributing to longer service life. Withstanding exposure to harsh process and exhaust gases, JPF58 provides proven reliability in demanding applications, maintaining dimensional stability during continuous operation under high loads and elevated temperatures. The material is ideal for seals and components within high-temperature processes including RTP, ALD, CVD and diffusion furnaces, quartz tube, plenum, chamber and furnace door seals, and exhaust and vacuum connection flanges and centering rings.
PureFab® VPF20 is a high-purity fluoroelastomer (FKM) that ensures contamination-free production to meet the stringent demands of semiconductor and flat panel display manufacturing. It combines a fluorosurfactant-free base polymer with high-purity synthetic fillers to help minimize metallic contaminants and ionic extractables, delivering exceptional performance and reliability in purity critical applications. With robust mechanical strength and elastic recovery, VPF20 provides greater durability in both static and dynamic sealing applications, and demonstrates strong chemical resistance with key process chemistries. VPF20 delivers a more cost-effective option than FFKM for applications with moderate temperatures and medium chemical demands. It is ideal for manufacturing seals in transfer modules, load locks, equipment front end modules (EFEM) and vacuum handling systems, general purpose vacuum seals and flat panel display manufacturing equipment, and purity critical applications where standard black FKMs risk contamination.