The Vapor Delivery Modules (VDM) are compact sub-systems incorporating a liquid flow controller (thermal or Coriolis), one or two mass-flow controllers for carrier gas and a temperature-controlled mixing and evaporation device. The modules are equipped with a 1.8-in. thin-film transistor…
The new SKW (slurry knife wafer) valve was developed for applications where abrasive or corrosive slurries, powders or coarse substances are processed. The company has engineered its SKW valve at full-bore with no flow restrictions, allowing processes with abrasive or…