I D
× COMMENTARYEDITOR'S PAGECOVER STORYIN THE NEWSNEWSFRONTSCHEMENTATOR + Show More
Chemical EngineeringChementator briefs
L-Alanine DMC Biotechnologies, Inc. (DMC; Boulder, Colo.; www.dmcbio.com) has successfully…
Chemical EngineeringPiezoelectric wood
Researchers at the Swiss Federal Laboratories for Materials Science and…
BUSINESS NEWSTECHNICAL & PRACTICALFEATURE REPORTFACTS AT YOUR FINGERTIPSTECHNOLOGY PROFILESOLIDS PROCESSINGEQUIPMENT & SERVICESAPPLIED TECHNOLOGIESFOCUSNEW PRODUCTS + Show More

Comment uncategorized

A new turbopump for ion-implantation applications

By Mary Page Bailey and Gerald Ondrey |

HiPace 2800 IT (photo) is a turbomolecular pump especially dedicated for ion-implantation applications. The rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures very good process adaption for ion-implantation processes, where hydrogen is the gas most likely to accumulate. The pump has a pumping speed of 2,600 L/s for hydrogen. An intelligent temperature-management system prevents process condensation and deposition inside the pumping system. It allows users to set the temperature individually to support the process. — Pfeiffer Vacuum GmbH, Asslar, Germany

www.pfeiffer-vacuum.com

 

Related Content
Focus on Pumps
New sizes available for progressive-cavity pumps NEMO progressive-cavity pumps with the FSIP design (photo) are capable of pumping and precisely…

Chemical Engineering publishes FREE eletters that bring our original content to our readers in an easily accessible email format about once a week.
Subscribe Now
Steel Belt Units for Medical Membranes
Upstream Oil & Gas: Automation intelligence from wellhead to distribution
Video - CoriolisMaster
Video - Do you really need a thermowell?
The influence of IIoT in the dewatering process step of pigment production

View More