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Chemical Engineering

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A new turbopump for ion-implantation applications

| By Mary Page Bailey and Gerald Ondrey

HiPace 2800 IT (photo) is a turbomolecular pump especially dedicated for ion-implantation applications. The rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures very good process adaption for ion-implantation processes, where hydrogen is the gas most likely to accumulate. The pump has a pumping speed of 2,600 L/s for hydrogen. An intelligent temperature-management system prevents process condensation and deposition inside the pumping system. It allows users to set the temperature individually to support the process. — Pfeiffer Vacuum GmbH, Asslar, Germany