Environment, Health, Safety & Security

Reduce footprint with these exhaust-treatment systems

March 28, 2011 | By Chemical Engineering

Edwards

The Zenith range of integrated exhaust management systems (photo) has been expanded to include a new offering incorporating the iXH harsh process vacuum pump and the Alas family of gas-abatement solutions. This expansion of the Zenith range offers semiconductor manufacturers a highly efficient, low cost-of-ownership solution to the increasing vacuum and abatement demands of advanced semiconductor processing at the 60-nm and smaller design rules, says the manufacturer. A Zenith exhaust management solution can reduce system footprints by up to 70% and can reduce utility hookups by over 60%, says the firm. — Edwards, Crawley, U.K.

www.edwardsvacuum.com

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Reduce footprint with these exhaust-treatment systems