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Solvay develops on-site F2 production units as alternative to NF3  

By Gerald Ondrey |

Solvay S.A. (Brussels, Belgium; www.solvay.com) is going to test a new on-site, electronic-grade fluorine-gas production unit at its industrial site in Onsan, Korea. After testing, the unit will be installed at a customer site. This production equipment, with a capacity of 100 metric tons electronic grade F2 gas per year, makes it possible to produce this rather limited quantity in cost-effective way. And as the device is modular, it is easy to increase capacity if needed. F2 is a good replacement for nitrogen trifluoride gas as cleaning gas in the photovoltaic, semiconductor and display industry as F2 has no global warming potential compared to NF3 which is a 17,200 times more potent greenhouse gas than carbon dioxide. Furthermore, replacing NF3 with F2 gas decreases both the consumed gas volume and the cleaning time, which both enable the customers to increase productivity, says Solvay. "With this breakthrough technology we can offer our customers tailor-made solutions whatever their needs. With its long-standing experience as Fluor producer, Solvay is the only company able to offer to customers a reliable and optimal solution for any quantity, from a limited number of kilos to several hundred tons pure fluorine gas per year,"…
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