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Temperature control for the semiconductor industry

By Chemical Engineering |

Lauda Dr. R. Wobser

The new Semistat series of thermoelectric process thermostats (photo) are used to control temperature in etching processes in the semiconductor industry. Semistat S 1200 is an entry-level device that offers a small footprint with a cooling output of 1.2 kW at 20°C. The Semistat S 2400 incorporates the latest innovations from the thermoelectrics sector, including high-performance Peltier elements, which guarantee a higher power density and greater reliability. The Semistat 4400, with 4.4-kW cooling output, is designed for applications using 300-mm wafers with a high cooling-output requirement at low temperatures. — Lauda Dr. R. Wobser GmbH & Co. KG, Lauda-Königshofen, Germany

www.lauda.de

 

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