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| Edwards |
Spectra ZW (photo) is a single, compact system for abating the deposition and clean gases used in the very high gas flow, chemical-vapor deposition (CVD) process steps in the manufacture of solar cells and flat panel displays. A wet scrubbing system is integrated within the Spectra ZW for a total abatement/waste-processing solution. The system has a maximum, standard process-gas flow of more than 16 L/min of silane, 200 L/min of H2 and 40 L/min of NF3 — all of which are commonly used during the CVD processing step in solar-cell manufacturing. In addition, most dopant materials, such as phosphine, diborane or trimethyl borate, as well as etch materials, can be abated and processed effectively by these units. — Edwards Ltd., Crawley, U.K.