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HF effluent treatment

By Chemical Engineering |

Last month, BOC Edwards (Wilmington, Mass.; edlinks.chemengonline.com/6517-549) completed installations of its new ERIX wastewaster treatment system at the College of Nanoscale Science and Engineering, of the University of Albany’s Albany NanoTech complex (N.Y.). The installation is a development step towards full commercialization of BOC Edwards’ ERIX (electrochemically regenerated ion exchange) system, slated to be launched in the first half of 2007. ERIX is said to recover 90% of point-of-use (POU) scrubber water while concentrating the hydrogen fluoride – a common pollutant from semiconductor processes – in the effluent. The effluent concentration from ERIX is more than 1,200 ppm, so the hydraulic load and chemical consumption is reduced for the downstream precipitation treatment facility.
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